A dual-mass capacitive-readout accelerometer operated near pull-in

Author: Patrick De Baets, Johan Raman, Pieter Rombouts, Ludo Weyten, Pierre Woestyn
Publisher: Institute of Electrical and Electronics Engineers (IEEE)

ABOUT BOOK

A mechanical two-mass configuration and a readout circuit for a single-axis capacitive-readout accelerometer with ΣΔ force-feedback is presented. The system reduces electrical and quantisation input-referred noise through the use of negative springs, reduced gaps in the readout capacitors and maximised readout voltage. A theoretical analysis and simulation results are discussed

Powered by: